Patent Assignment
Reel/Frame 023614/0507
Assignment of Assignor's Interest
Recorded: 2009-12-07
Pages: 4
Assignors
HARADA, YUJI
Executed: 2009-11-09
HATAKEYAMA, JUN
Executed: 2009-11-09
HASEGAWA, KOJI
Executed: 2009-11-09
MAEDA, KAZUNORI
Executed: 2009-11-09
KOBAYASHI, TOMOHIRO
Executed: 2009-11-09
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process