Assignment of Assignor's Interest

Recorded: 2009-12-07 Pages: 5

Assignors

KRAEHMER, DANIEL

Executed: 2009-12-01

KAMENOV, VLADIMIR

Executed: 2009-12-07

TOTZECK, MICHAEL

Executed: 2009-12-03

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Projection Objective for Microlithography

Application: 12/624,755 →

Publication: US 2010/0079741

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.