Patent Assignment
Reel/Frame 023618/0608
Assignment of Assignor's Interest
Recorded: 2009-12-08
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Exposure System for Microlithography
Application:
12/623,744 →
Publication:
US 2010/0134768
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.