Assignment of Assignor's Interest

Recorded: 2009-12-09 Pages: 4

Assignors

EISENMENGER, JOHANNES

Executed: 2009-10-19

STAMMLER, THOMAS

Executed: 2009-10-19

ELL, RICHARD

Executed: 2009-10-24

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Optical Measurement Apparatus for a Projection Exposure System

Application: 12/569,430 →

Publication: US 2010/0079738

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.