Patent Assignment
Reel/Frame 023629/0284
Assignment of Assignor's Interest
Recorded: 2009-12-09
Pages: 5
Assignors
GOEHNERMEIER, AKSEL
Executed: 2009-12-09
KRAEHMER, DANIEL
Executed: 2009-12-01
KAMENOV, VLADIMIR
Executed: 2009-12-07
TOTZECK, MICHAEL
Executed: 2009-12-03
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Objective for Microlithography with Stray Light Compensation and Related Methods
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.