Patent Assignment
Reel/Frame 023635/0866
Assignment of Assignor's Interest
Recorded: 2009-12-10
Pages: 5
Assignors
DOERING, HANS-JOACHIM
Executed: 2009-12-08
ELSTER, THOMAS, DR.
Executed: 2009-12-09
HEINITZ, JOACHIM
Executed: 2009-12-09
SLODOWSKI, MATTHIAS
Executed: 2009-12-08
Assignee
VISTEC ELECTRON BEAM GMBH
GOESCHWITZER STRASSE 25, JENA, 07745, GERMANY
Covered Property
(1)
Arrangement for the Illumination of a Substrate with a Plurality of Individually Shaped Particle Beams for High-Resolution Lithography of Structure Patterns