Patent Assignment
Reel/Frame 023651/0171
Assignment of Assignor's Interest
Recorded: 2009-12-14
Pages: 3
Assignors
HARADA, YUJI
Executed: 2009-11-09
HATAKEYAMA, JUN
Executed: 2009-11-09
HASEGAWA, KOJI
Executed: 2009-11-09
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Protective Coating Compositon and Patterning Process