Patent Assignment
Reel/Frame 023652/0065
Assignment of Assignor's Interest
Recorded: 2009-12-15
Pages: 3
Assignors
LEE, CHANG-HSIAO
Executed: 2009-12-10
LAI, YU-TSUNG
Executed: 2009-12-10
LIAO, JIUNN-HSIUNG
Executed: 2009-12-10
Assignee
UNITED MICROELECTRONICS CORP.
NO.3, LI-HSIN ROAD 2, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU CITY, TAIWAN
Covered Property
(1)
Method of Removing Post-Etch Residues