Patent Assignment
Reel/Frame 023682/0361
Assignment of Assignor's Interest
Recorded: 2009-12-21
Pages: 3
Assignee
CARL ZEISS SMT INC.
ONE COPORATION WAY, PEABODY, MASSACHUSETTS, 01960
Covered Property
(1)
Variable Energy Charged Particle Systems
Application:
61/247,311 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.