Patent Assignment
Reel/Frame 023698/0976
Assignment of Assignor's Interest
Recorded: 2009-12-24
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Exposure Apparatus and Device Manufacturing Method