Patent Assignment
Reel/Frame 023725/0480
Assignment of Assignor's Interest
Recorded: 2010-01-02
Pages: 3
Assignee
D2S, INC.
4040 MOORPARK AVENUE, #250, SAN JOSE, CALIFORNIA, 95117
Covered Property
(1)
Method and System for Fracturing a Pattern Using Charged Particle Beam Lithography with Multiple Exposure Passes Having Different Dosages