Patent Assignment
Reel/Frame 023730/0572
Confirmatory License
Recorded: 2010-01-04
Pages: 2
Assignor
UNIVERSITY OF ILLINOIS URBANA-CHAMPAIGN
Executed: 2009-10-08
Assignee
NATIONAL SCIENCE FOUNDATION
4201 WILSON BLVD, ROOM 1265, ARLINGTON, VIRGINIA, 22230
Covered Property
(1)
Methods for Coating and Filling High Aspect Ratio Recessed Features
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.