Patent Assignment
Reel/Frame 023730/0683
Assignment of Assignor's Interest
Recorded: 2010-01-04
Pages: 11
Assignors
COMPEN, RENE THEODORUS PETRUS
Executed: 2009-12-09
VAN NUNEN, GERARDUS PETRUS MATTHIJS
Executed: 2009-12-08
HOUBEN, MARTIJN
Executed: 2009-12-09
VAN DEN HEUVEL, MARCO ADRIANUS PETER
Executed: 2009-12-08
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504-DR, NETHERLANDS
Covered Property
(1)
Calibration Method and Lithographic Apparatus for Calibrating an Optimum Take Over Height of a Substrate