Assignment of Assignor's Interest

Recorded: 2010-01-12 Pages: 5

Assignors

DEGUENTHER, MARKUS

Executed: 2009-12-16

MAJOR, ANDRAS G.

Executed: 2010-01-11

ANDRESEN, ANNE CHRISTINE

Executed: 2009-12-22

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System of a Microlithographic Projection Exposure Apparatus

Patent: 8,773,639 →

Application: 12/632,055 →

Publication: US 2010/0103400

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.