Patent Assignment
Reel/Frame 023775/0627
Assignment of Assignor's Interest
Recorded: 2010-01-13
Pages: 4
Assignors
FRANK, DIETER
Executed: 2009-12-17
PUGGL, MICHAEL
Executed: 2009-12-17
SCHWARZFURTNER, ALEXANDER
Executed: 2009-12-22
Assignee
LAM RESEARCH AG
SEZ-STRASSE 1, VILLACH, 9500, AUSTRIA
Covered Property
(1)
Apparatus and Method for Wet Treatment of Disc-Like Articles