Patent Assignment
Reel/Frame 023797/0404
Assignment of Assignor's Interest
Recorded: 2010-01-15
Pages: 6
Assignors
MATSUMOTO, KENJI
Executed: 2009-12-15
HOSAKA, SHIGETOSHI
Executed: 2009-12-15
KOIKE, JUNICHI
Executed: 2010-01-07
NEISHI, KOJI
Executed: 2010-01-07
Assignees
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
TOHOKU UNIVERSITY
1-1, KATAHIRA 2-CHOME, AOBA-KU, SENDAI-SHI, MIYAGI, 980-8577, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method, Semiconductor Manufacturing Apparatus and Storage Medium