Patent Assignment
Reel/Frame 023799/0692
Assignment of Assignor's Interest
Recorded: 2010-01-15
Pages: 4
Assignors
FUNK, MERRITT
Executed: 2010-01-14
CHEN, LEE
Executed: 2010-01-12
SUNDARARAJAN, RADHA
Executed: 2010-01-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus and Method for Improving Photoresist Properties Using a Quasi-Neutral Beam