Assignment of Assignor's Interest

Recorded: 2010-01-21 Pages: 5

Assignors

ZIMMERMANN, JOERG

Executed: 2010-01-12

FELDMANN, HEIKO

Executed: 2010-01-12

HEIL, TILMANN

Executed: 2010-01-13

GRAEUPNER, PAUL

Executed: 2010-01-12

GEBHARDT, ULRICH

Executed: 2010-01-19

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Projection Exposure Method and Projection Exposure Apparatus for Microlithography

Patent: 7,800,732 →

Application: 12/643,637 →

Publication: US 2010/0157266

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.