Assignment of Assignor's Interest

Recorded: 2010-01-21 Pages: 4

Assignors

FIOLKA, DAMIAN

Executed: 2010-01-21

MUELLER, RALF

Executed: 2010-01-15

MAJOR, ANDRAS G.

Executed: 2010-01-15

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System of a Microlothographic Projection Exposure Apparatus

Patent: 7,782,443 →

Application: 12/646,021 →

Publication: US 2010/0157268

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.