Patent Assignment
Reel/Frame 023825/0851
Assignment of Assignor's Interest
Recorded: 2010-01-21
Pages: 6
Assignors
MUELLER, RALF
Executed: 2010-01-19
GRUNER, TORALF
Executed: 2010-01-19
TOTZECK, MICHAEL
Executed: 2010-01-20
FELDMANN, HEIKO
Executed: 2010-01-19
PAUL, HANS-JOCHEN
Executed: 2010-01-18
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Interference Systems for Microlithgraphic Projection Exposure Systems
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.