Patent Assignment
Reel/Frame 023825/0964
Assignment of Assignor's Interest
Recorded: 2010-01-21
Pages: 6
Assignors
DE VRIES, GOSSE CHARLES
Executed: 2009-12-09
BUIS, EDWIN JOHAN
Executed: 2009-12-09
MICKAN, UWE
Executed: 2009-12-18
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Actuator System, Lithographic Apparatus, Method of Controlling the Position of a Component and Device Manufacturing Method