Patent Assignment
Reel/Frame 023830/0058
Assignment of Assignor's Interest
Recorded: 2010-01-22
Pages: 3
Assignors
KITANO, NAOMU
Executed: 2009-12-25
MINAMI, TAKASHI
Executed: 2009-12-24
KOSUDA, MOTOMU
Executed: 2009-12-25
WATANABE, HEIJI
Executed: 2009-12-21
Assignee
CANON ANELVA CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, 215-8550, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Apparatus and Method