Patent Assignment
Reel/Frame 023833/0622
Assignment of Assignor's Interest
Recorded: 2010-01-22
Pages: 5
Assignors
KIENZLE, OLIVER
Executed: 2009-11-09
RICHTER, RIGO
Executed: 2009-11-10
ROSENKRANZ, NORBERT
Executed: 2009-11-16
KOBIYAMA, YUJI
Executed: 2010-01-07
SCHERUEBL, THOMAS
Executed: 2009-11-07
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, D-07745, GERMANY
Covered Property
(1)
Method and Apparatus for Analyzing a Group of Photolithographic Masks
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.