Patent Assignment
Reel/Frame 023833/0673
Assignment of Assignor's Interest
Recorded: 2010-01-22
Pages: 4
Assignors
MANN, HANS-JUERGEN
Executed: 2009-11-03
TOTZECK, MICHAEL
Executed: 2009-10-30
KERWIEN, NORBERT
Executed: 2009-11-03
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, D-07745, GERMANY
Covered Property
(1)
Microscope and Microscopy Method for Space-Resolved Measurement of a Predetermined Structure, in Particular a Structure of a Lithographic Mask
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.