Patent Assignment
Reel/Frame 023837/0418
Assignment of Assignor's Interest
Recorded: 2010-01-25
Pages: 2
Assignee
SILTRONIC AG
HANNS-SEIDEL-PLATZ 4, MUNICH, 81737, GERMANY
Covered Property
(1)
Method for Identifying an Incorrect Position of a Semiconductor Wafer During a Thermal Treatment