Patent Assignment
Reel/Frame 023845/0408
Assignment of Assignor's Interest
Recorded: 2010-01-26
Pages: 4
Assignors
YATSUDA, KOICHI
Executed: 2010-01-25
OOYA, YOSHINOBU
Executed: 2010-01-22
OKAMOTO, SHIN
Executed: 2010-01-25
MOCHIKI, HIROMASA
Executed: 2010-01-25
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Apparatus, Plasma Etching Method and Storage Medium