Patent Assignment
Reel/Frame 023888/0540
Assignment of Assignor's Interest
Recorded: 2010-02-03
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Dry Etching Method for Silicon Nitride Film