Assignment of Assignor's Interest

Recorded: 2010-02-04 Pages: 3

Assignors

ARNZ, MICHAEL

Executed: 2009-12-23

KLOSE, GERD

Executed: 2010-01-11

Assignee

CARL ZEISS SMS GMBH

CARL-ZEISS-PROMENADE 10, JENA, D-07745, GERMANY

Covered Property (1)

Method and Apparatus for Determining the Relative Overlay Shift of Stacked Layers

Patent: 8,260,033 →

Application: 12/599,127 →

Publication: US 2010/0208935

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.