Patent Assignment
Reel/Frame 023918/0567
Assignment of Assignor's Interest
Recorded: 2010-02-09
Pages: 4
Assignors
CHEN, ZHIGANG
Executed: 2009-11-25
RAUF, SHAHID
Executed: 2009-11-25
MERRY, WALTER R.
Executed: 2009-11-30
DORF, LEONID
Executed: 2009-11-30
RAMASWAMY, KARTIK
Executed: 2009-11-25
COLLINS, KENNETH S.
Executed: 2009-12-01
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Efficient and Accurate Method for Real-Time Prediction of the Self-Bias Voltage of a Wafer and Feedback Control of Esc Voltage in Plasma Processing Chamber