Patent Assignment
Reel/Frame 023938/0628
Assignment of Assignor's Interest
Recorded: 2010-02-16
Pages: 2
Assignor
JUERGENS, DIRK
Executed: 2010-02-15
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Exposure Method, System and Objective
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.