Patent Assignment
Reel/Frame 023946/0830
Assignment of Assignor's Interest
Recorded: 2010-02-16
Pages: 4
Assignors
OHASHI, MASAKI
Executed: 2009-12-07
KINSHO, TAKESHI
Executed: 2009-12-07
OHSAWA, YOUICHI
Executed: 2009-12-07
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Novel Sulfonate and Its Derivative, Photosensitive Acid Generator, and Resist Composition and Patterning Process Using the Same