Patent Assignment
Reel/Frame 023959/0415
Assignment of Assignor's Interest
Recorded: 2010-02-12
Pages: 3
Assignee
CANON ANELVA CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Tray, Tray Support Member, and Vacuum Processing Apparatus