Patent Assignment
Reel/Frame 023967/0115
Assignment of Assignor's Interest
Recorded: 2010-02-22
Pages: 5
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and System for Indirect Determination of Local Irradiance in an Optical System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.