Assignment of Assignor's Interest

Recorded: 2010-02-22 Pages: 2

Assignors

TAKAHATA, SATORU

Executed: 2009-12-04

OZAKI, YUKIO

Executed: 2009-12-08

NUNOZAWA, REIZO

Executed: 2009-12-04

Assignee

HITACHI KOKUSAI ELECTRIC, INC.

14-1 SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device

Patent: 9,437,465 →

Application: 12/631,152 →

Publication: US 2010/0144145

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.