Patent Assignment
Reel/Frame 023975/0433
Assignment of Assignor's Interest
Recorded: 2010-02-18
Pages: 3
Assignee
CANON ANELVA CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI,, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Substrate Support Apparatus and Substrate Transport Apparatus Having Shock Absorption