Patent Assignment
Reel/Frame 023975/0481
Assignment of Assignor's Interest
Recorded: 2010-02-23
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithography Projection Optical System and Method for Manufacturing a Device
Application:
12/702,040 →
Publication:
US 2010/0134907
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.