Patent Assignment
Reel/Frame 023977/0399
Assignment of Assignor's Interest
Recorded: 2010-02-23
Pages: 3
Assignor
HONDA, MASANOBU
Executed: 2010-02-03
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing with Shrink Etching Step