Patent Assignment
Reel/Frame 023983/0063
Change of Name
Recorded: 2010-02-24
Pages: 13
Assignor
ANELVA CORPORATION
Executed: 2005-10-03
Assignee
CANON ANELVA CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, KANAGAWA, 215-8550, JAPAN
Covered Property
(1)
Silicon Nitride Film Forming Method