Patent Assignment
Reel/Frame 024011/0869
Assignment of Assignor's Interest
Recorded: 2010-03-02
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Hybrid in-Situ Dry Cleaning of Oxidized Surface Layers