Patent Assignment
Reel/Frame 024013/0791
Assignment of Assignor's Interest
Recorded: 2010-03-02
Pages: 5
Assignee
NGK INSULATORS, LTD.
2-56, SUDA-CHO, MIZUHO-KU, NAGOYA-CITY, AICHI-PREFECTURE, 467-8530, JAPAN
Covered Property
(1)
Film Deposition Apparatus
Application:
12/715,698 →
Publication:
US 2010/0199913