Patent Assignment
Reel/Frame 024015/0146
Assignment of Assignor's Interest
Recorded: 2010-03-02
Pages: 4
Assignors
MIYAIRI, HIDEKAZU
Executed: 2010-02-15
KATO, ERIKA
Executed: 2010-02-15
SUZUKI, KUNIHIKO
Executed: 2010-02-15
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Thin Film Transistor Including Silicon Nitride Layer and Manufacturing Method Thereof