IP Library › Assignment 024029/0870
Patent Assignment
Reel/Frame 024029/0870

ASSIGNMENT OF ASSIGNOR'S INTEREST

Recorded: 2010-03-04 Received: 2010-03-04 Pages: 3
Assignor
SATOH, SHU
Executed: 2010-03-01
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MA, 01915-1053, UNITED STATES
Covered Applications (2)
METHOD FOR IMPROVING IMPLANT UNIFORMITY DURING PHOTORESIST OUTGASSING
App. No. 12/717,536
→
CONTROLLED POLARITY GROUP III-NITRIDE FILMS AND METHODS OF PREPARING SUCH FILMS
App. No. 11/382,806
→