IP Library › Granted Patent US 8,080,814
Granted Patent Utility
US 8,080,814 · Confirmation No. 3000

METHOD FOR IMPROVING IMPLANT UNIFORMITY DURING PHOTORESIST OUTGASSING

Inventor: Shu Satoh
⬇ PDF
 Code Description Pages PDF
2023-07-06 MF.AD.PAIR Maintenance Fee Address Change for PAIR 1 View
2023-07-06 C.AD.PAIR Change of Address via Patent Application Information Retrieval (PAIR) 1 View
2011-11-30 ISSUE.NTF Issue Notification 1 View
2011-11-25 1449 List of References cited by applicant and considered by examiner 1 View
2011-11-21 IFEE Issue Fee Payment (PTO-85B) 1 View
2011-11-21 WFEE Fee Worksheet (SB06) 2 View
2011-11-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-09-20 NOA Notice of Allowance and Fees Due (PTOL-85) 8 View
2011-09-20 892 List of references cited by examiner 1 View
2011-09-20 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2011-09-20 SRFW Search information including classification, databases and other search related notes 1 View
2011-09-20 BIB Bibliographic Data Sheet 1 View
2011-09-20 1449 List of References cited by applicant and considered by examiner 2 View
2011-09-20 1449 List of References cited by applicant and considered by examiner 2 View
2011-09-20 FWCLM Index of Claims 1 View
2011-09-20 SRNT Examiner's search strategy and results 2 View
2011-09-20 1449 List of References cited by applicant and considered by examiner 3 View
2011-09-08 NTC.PUB Notice of Publication 1 View
2011-08-29 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2011-08-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-08-29 TRAN.LET Transmittal Letter 2 View
2011-05-26 P.LET Miscellaneous incoming letter from Applicant - International Application 1 View
2011-05-26 P.SUB.SHEET Substitute Sheets - International Application 1 View
2011-03-03 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2011-03-03 TRAN.LET Transmittal Letter 1 View
2011-03-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-03-03 TRAN.LET Transmittal Letter 2 View
2010-03-18 APP.FILE.REC Filing Receipt 3 View
2010-03-04 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2010-03-04 TRAN.LET Transmittal Letter 2 View
2010-03-04 SPEC Specification 21 View
2010-03-04 CLM Claims 4 View
2010-03-04 ABST Abstract 1 View
2010-03-04 DRW Drawings-only black and white line drawings 10 View
2010-03-04 WFEE Fee Worksheet (SB06) 2 View
2010-03-04 N417 Electronic Filing System Acknowledgment Receipt 3 View
2010-03-04 ADS Application Data Sheet 4 View
2010-03-04 OATH Oath or Declaration filed 2 View
2010-03-04 TRAN.LET Transmittal Letter 2 View
2010-03-04 WFEE Fee Worksheet (SB06) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 8,080,814
App. No.
12/717,536
Filed
2010-03-04
Granted
2011-12-20
Pub. No.
US20110215262A1
Art Unit
2881
PTA
0 days