Patent Assignment
Reel/Frame 024032/0159
Assignment of Assignor's Interest
Recorded: 2010-03-04
Pages: 4
Assignor
SHIBAZAKI, YUICHI
Executed: 2010-01-22
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Exposure Apparatus, Exposure Method, Device Manufacturing Method, and Carrier Method