Patent Assignment
Reel/Frame 024054/0157
Assignment of Assignor's Interest
Recorded: 2010-03-08
Pages: 2
Assignor
HUDSON, ERIC A.
Executed: 2010-02-25
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System, Method and Apparatus for Plasma Etch Having Independent Control of Ion Generation and Dissociation of Process Gas