Patent Assignment
Reel/Frame 024067/0383
Assignment of Assignor's Interest
Recorded: 2010-03-05
Pages: 3
Assignors
JANG, ILYONG
Executed: 2010-02-17
WOO, SANGGYUN
Executed: 2010-02-17
HUH, SUNGMIN
Executed: 2009-12-17
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416 MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Extreme Ultraviolet Photomask and Methods and Apparatuses for Manufacturing the Extreme Ultraviolet Photomask