Patent Assignment
Reel/Frame 024083/0138
Assignment of Assignor's Interest
Recorded: 2010-03-15
Pages: 4
Assignors
WANG, KUAN-CHEN
Executed: 2010-03-15
SHIH, PO-CHENG
Executed: 2010-03-15
KO, CHUNG-CHI
Executed: 2010-03-15
LIN, KENG-CHU
Executed: 2010-03-15
JENG, SHWANG-MING
Executed: 2010-03-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Low-K Cu Barriers in Damascene Interconnect Structures