Patent Assignment
Reel/Frame 024088/0772
Assignment of Assignor's Interest
Recorded: 2010-03-16
Pages: 4
Assignors
YASSERI, AMIR A.
Executed: 2010-02-01
ZHU, JI
Executed: 2010-02-01
YUN, SEOKMIN
Executed: 2010-02-01
MUI, DAVID S. L.
Executed: 2010-02-01
MIKHAYLICHENKO, KATRINA
Executed: 2010-02-01
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Reducing Pattern Collapse in High Aspect Ratio Nanostructures