Patent Assignment
Reel/Frame 024089/0089
Assignment of Assignor's Interest
Recorded: 2010-03-16
Pages: 2
Assignor
SCHARNWEBER, RALF
Executed: 2008-07-30
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for a Multiple Exposure, Microlithography Projection Exposure Installation and a Projection System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.