Patent Assignment
Reel/Frame 024093/0328
Assignment of Assignor's Interest
Recorded: 2010-03-17
Pages: 5
Assignors
FIOLKA, DAMIAN
Executed: 2010-03-15
WALLDORF, DANIEL
Executed: 2010-03-13
SAENGER, INGO
Executed: 2010-03-15
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System of a Microlithographic Projection Exposure Apparatus with a Birefringent Element
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.